Arsine source replacement for the growth of gallium arsenide via MOCVD

URI
Main Digital Collection
Digital Collection
Author(s)
Mirandi, Thomas M.
Publisher
Toxics Use Reduction Institute, University of Massachusetts Lowell
Date Issued
1993-08
Language
English (United States)
Type
Book
Digital Collection
Organizations / Corporate Body
University of Massachusetts at Lowell. Toxics Use Reduction Institute.
File(s)
Thumbnail Image
Name

ocm40902807.pdf

Size

843.31 KB

Format

Adobe PDF

Checksum (MD5)

1949b2714538efff1651b5d9c81e825d